If you would like additional information, please contact:

Goddard Space Flight Center
Innovative Partnerships Program Office
Code 504
phone: (301) 286-5810
email: Innovative Partnerships Program Office

Thin Implantation

+ Physical Vapor Deposition: Evaporation + Physical Vapor Deposition: Sputtering + Chemical Vapor Deposition Thin films with thickness levels ranging from angstroms to microns are required to fabricate microelectronic devices. Goddard offers physical and chemical vapor systems for depositing high-quality metal and dielectric thin films.		MENU + Ion Implantation – Thin Implantation + Plasma Etching + Wet Chemistry + Annealing + Photolithography + Safety CONTACTS