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NASA Goddard Space Flight Center
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Goddard Space Flight Center
Innovative Partnerships Program Office
Code 504
phone: (301) 286-5810
email: Innovative Partnerships Program Office

Detector Development Laboratory

Wet Chemistry

Wet Chemistry
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Wet Chemistry Facilities:
  • KOH wet etch base hood for silicon etching and micromachining
  • HF wet etch acid bath for removing surface oxide before thermal processing
  • Manual acid and base stations for etching using a variety of chemicals (KOH, NaOH, HF, Al)
  • Manual solvent bench for photoresist stripping
  • Vertex spin-rince dryer for after wet processing

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+ Ion Implantation
+ Thin Implantation
+ Plasma Etching
– Wet Chemistry
+ Annealing
+ Photolithography
+ Safety

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